Pellicle pasting system and method
US5888327A · kind A · utility
10Cited by
7References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 16, 1997 |
| Grant date | Mar 30, 1999 |
| Priority date | — |
| Expiry date | May 16, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1744
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A pellicle pasting system and method pastes a pellicle on a mask. The system includes a washing apparatus to wash the mask; a first mask transport apparatus to transport the mask washed by the washing apparatus; a first inspection apparatus to inspect whether foreign objects are attached to the mask received from the first mask transport apparatus; a second mask transport apparatus to transport the mask when the first inspection apparatus determines that the foreign objects are substantially absent from the mask; and a pellicle pasting apparatus to paste the pellicle on the mask received from the second mask transport apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.