Micromechanical rate of rotation sensor having ring with drive element and detection element
US5889207A · kind A · utility
59Cited by
0References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 15, 1997 |
| Grant date | Mar 30, 1999 |
| Priority date | — |
| Expiry date | Apr 15, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5684
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A rate of rotation sensor is structured as a micromechanical component on the surface of a substrate. The rate of rotation sensor has a ring with drive elements and detection elements. The ring is made to oscillate by means of the drive elements, and the deformation of the ring which results from Coriolis forces is detected by the detection elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.