Markus Lutz
145Patents
31h-index
95Co-inventors
93Inventor score
Filing activity: Jun 6, 1995 → Apr 22, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5728936A | Rotary speed sensor | Physics | 150 | Expired |
| US6936491B2 | Method of fabricating microelectromechanical systems and devices having trench isolated contacts | Performing Operations; Transporting | 112 | Expired |
| US5604312A | Rate-of-rotation sensor | Physics | 101 | Expired |
| US6995622B2 | Frequency and/or phase compensated microelectromechanical oscillator | Electricity | 98 | Expired |
| US5703293A | Rotational rate sensor with two acceleration sensors | Physics | 78 | Expired |
| US6987432B2 | Temperature compensation for silicon MEMS resonator | Electricity | 77 | Expired |
| US5723353A | Process for manufacturing a sensor | Emerging Cross-Sectional Technologies | 71 | Expired |
| US6928879B2 | Episeal pressure sensor and method for making an episeal pressure sensor | Performing Operations; Transporting | 67 | Expired |
| US7202761B2 | Temperature compensation for silicon MEMS resonator | Electricity | 66 | Expired |
| US6106735A | Wafer stack and method of producing sensors | Electricity | 65 | Expired |
| US5889207A | Micromechanical rate of rotation sensor having ring with drive element and detection element | Physics | 59 | Expired |
| US5627317A | Acceleration sensor | Physics | 54 | Expired |
| US6930367B2 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Performing Operations; Transporting | 49 | Expired |
| US6762072B2 | SI wafer-cap wafer bonding method using local laser energy, device produced by the method, and system used in the method | Performing Operations; Transporting | 49 | Expired |
| US5937275A | Method of producing acceleration sensors | Physics | 48 | Expired |
| US7449355B2 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Electricity | 45 | Expired |
| US6752017B2 | Rotation speed sensor | Physics | 45 | Expired |
| US7227432B2 | MEMS resonator array structure and method of operating and using same | Electricity | 44 | Expired |
| US6214243A | Process for producing a speed of rotation coriolis sensor | Performing Operations; Transporting | 44 | Expired |
| US6122964A | Micromechanical comb structure | Physics | 43 | Expired |
| US7075160B2 | Microelectromechanical systems and devices having thin film encapsulated mechanical structures | Electricity | 43 | Expired |
| US7102467B2 | Method for adjusting the frequency of a MEMS resonator | Electricity | 43 | Expired |
| US5959208A | Acceleration sensor | Emerging Cross-Sectional Technologies | 41 | Expired |
| US5631422A | Sensor comprising multilayer substrate | Physics | 41 | Expired |
| US7068125B2 | Temperature controlled MEMS resonator and method for controlling resonator frequency | Electricity | 40 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.