Method of and apparatus for independently controlling electric parameters of an impedance matching network
US5889252A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 1996 |
| Grant date | Mar 30, 1999 |
| Priority date | — |
| Expiry date | Dec 19, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32183
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An arrangement and method for matching a load and a power source, such as an r.f. power source for a vacuum plasma processing chamber, includes a match network coupled between the power source and the load. The match network has at least two controllably variable electrical characteristics. A sensor is provided that senses at least two parameters of the load. A drive controller responds to the sensed parameters of the load to independently control varying a first one of the electrical characteristics of the match network as a function of only one of the parameters of the load, and a second one of the electrical characteristics of the match network as a function of another one of the parameters of the load. This is done until the power source and the load are in a matched condition. The separation of the match variables to establish a nearly one-to-one correspondence with the load parameters allows independent adjustment of the match variables to provide fast and unambiguous reaching of the matched condition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.