Spin on glass material and method for forming a semiconductor device by using improved spin on glass material
US5891234A · kind A · utility
5Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 1996 |
| Grant date | Apr 6, 1999 |
| Priority date | — |
| Expiry date | Mar 21, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C1/008
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A spin on glass composition which includes in a solvent as a main component alkoxysilane represented by H.sub.n Si(OR).sub.4-n, where n is 1, 2, or 3 and R is an alkyl group. Water or alcohol is available as a solvent. It is preferable to add the above alkoxysilane with at least any one of a phosphorus compound, boron compound and a germanium compound. It is also preferable to add the above alkoxysilane not only with tetraalkoxysilane Si(OR).sub.4, where R is an alkyl group, but also with at least any one of phosphorus compound, boron compound and germanium compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.