Apparatus for removing surface irregularities from a flat workpiece
US5895312A · kind A · utility
1Cited by
18References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 1996 |
| Grant date | Apr 20, 1999 |
| Priority date | — |
| Expiry date | Oct 30, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/302
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for removing surface irregularities from a flat workpiece includes one or more abrading assemblies through which the workpiece passes sequentially. Each abrading assembly has a lower contact assembly and an upper contact assembly. The upper contact assembly is precisely spaced above the lower contact assembly in opposing parallel relation to the lower assembly. The lower and upper contact assemblies reciprocate in opposing directions to provide abrading action to the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.