Patent · US Expired

Process for growing single crystal

US5895526A · kind A · utility

24Cited by
3References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 6, 1996
Grant dateApr 20, 1999
Priority date
Expiry dateAug 6, 2016

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B29/48
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A process for growing a single crystal comprises providing a single crystal substrate acting as a seed crystal above a source material in a container, heating the source material in an inert gas atmosphere in the container to form a sublimed source material, and discharging the sublimed source material from the container through a port above the single crystal substrate, to cause the sublimed source material to flow along and in parallel with a surface of the single crystal substrate, and grow a single crystal on the surface of the single crystal substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.