Detector objective lens
US5895917A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 18, 1997 |
| Grant date | Apr 20, 1999 |
| Priority date | — |
| Expiry date | Jun 18, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2594
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention relates to a detector objective lens and a charged particle am device with such a detector objective lens containing a main lens for focussing a charged particle beam on a specimen, which consists of a magnetic lens (60) and an electrostatic lens (61) and a detector (62) disposed in front of the magnetic lens (60) in the direction of the charged particle beam (2) for detecting the charged particles released at the specimen (8). An additional lens is provided for influencing the released charged particles, which generates an electrostatic and/or magnetic field and is disposed between the main lens and the detector, the fields of the main lens and said additional lens being substantially separated from each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.