Dual EPI active pixel cell design and method of making the same
US5898196A · kind A · utility
42Cited by
10References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 10, 1997 |
| Grant date | Apr 27, 1999 |
| Priority date | — |
| Expiry date | Oct 10, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/18
Abstract
The present invention is a dual epi active pixel sensor cell having a p- region of dual thickness and a method of making the same. The dual epi active pixel sensor cell produces a sensor with improved noise and latch-up reduction and improved red absorption. The thin p- epi region is positioned in the logic region for improved latch-up immunity. The thick p- epi is positioned in the pixel region for improved red absorption.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.