Two-stage vacuum bellows
US5899653A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 23, 1997 |
| Grant date | May 4, 1999 |
| Priority date | — |
| Expiry date | Jun 23, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for lifting an object in a sealed chamber and transferring an object from a robot to an operating member has a pair of concentrically mounted support members. A lower support member positioned within the chamber extends through an opening in the chamber is adapted to lift a wafer from a robot. A motion actuator positioned outside the chamber and attached to the lower support member is adapted to move the lower support member axially. An upper support member positioned within the chamber above the lower support member extends through an axial passageway in the lower support member to a position external the chamber and below the lower support member. A separate motion actuator positioned outside the chamber and attached to the upper support member is adapted to move the upper support member axially. A flexible vacuum bellows positioned in the chamber and between the upper support member, the lower support member, and the chamber provides a seal therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.