Articulated arm transfer device
US5899658A · kind A · utility
97Cited by
30References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 24, 1997 |
| Grant date | May 4, 1999 |
| Priority date | — |
| Expiry date | Oct 24, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K5/128
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A concentric-shaft rotational drive system for an articulated arm transfer device adaptable for imparting movement to an assembly inside a vacuum chamber wherein rotary movement is imparted to rotors inside the vacuum chamber by means of magnetic fields produced by stators outside the vacuum chamber
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.