Electrostatic chuck employing thermoelectric cooling
US5901030A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 2, 1997 |
| Grant date | May 4, 1999 |
| Priority date | — |
| Expiry date | Dec 2, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck employs thermoelectric cooling technology. The chuck includes a conductive circular base with an upper ring portion forming a first pole piece electrically isolated from an annular portion forming a second pole piece. The upper surface of the pole pieces have a dielectric material formed thereon and together form the electrostatic clamping surface for an article to be held thereon. The backside is provided with an annular recess containing a plurality of thermoelectric devices or modules and intervening spokes. The devices are covered with a heat sink or cooling plate through which a fluid such as water is circulated. A retaining back ring covers the water plate which is secured to the base by bolts. Uniform pressure is applied to the water plate and modules by means of spring washers inserted between back ring and water plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.