Device for chemical wet treatment
US5902402A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 3, 1997 |
| Grant date | May 11, 1999 |
| Priority date | — |
| Expiry date | Jul 3, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for chemical wet treatment of substrates has a tank containing a treatment fluid for treating the substrates. At least one substrate carrier for supporting the substrates within the tank is provided. At least one substrate lifting device for lifting the substrates off the substrate carrier is provided. A lifting apparatus for lifting and lowering the substrate carrier is positioned in the tank. The lifting apparatus has a first transport carriage connected to the substrate lifting device and a second transport carriage connected to a holder of the substrate carrier. The first and second transport carriages are connected to one another by a jointed connection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.