Steag Micro Tech GmbH
30Patents
0Active
30Granted
34Portfolio score
Filing activity: Jun 30, 1994 → Apr 17, 2002
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6108932A | Method and apparatus for thermocapillary drying | Electricity | 62 | Expired |
| US5992431A | Device for treating substrates in a fluid container | Emerging Cross-Sectional Technologies | 31 | Expired |
| US5921257A | Device for treating substrates in a fluid container | Emerging Cross-Sectional Technologies | 23 | Expired |
| US5902402A | Device for chemical wet treatment | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6539956B1 | Method and device for drying substrates | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6128829A | Method for drying substrates | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6205292A | Fluid heater | Electricity | 15 | Expired |
| US6569302B1 | Substrate carrier | Electricity | 15 | Expired |
| US5654041A | Method and device for lacquering or coating of a substrate by a capillary slot | Performing Operations; Transporting | 11 | Expired |
| US6240938A | Device for treating substrates in a fluid container | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6352084B1 | Substrate treatment device | Emerging Cross-Sectional Technologies | 8 | Expired |
| US5650196A | Device for coating substrates in semiconductor production | Performing Operations; Transporting | 8 | Expired |
| US6189552A | Substrate processing device | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6488779B1 | Method and apparatus for cleaning substrates | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6805754B1 | Device and method for processing substrates | Emerging Cross-Sectional Technologies | 4 | Expired |
| US5879464A | Method and device for wet-processing substrates in a vessel | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6799588B1 | Apparatus for treating substrates | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6523552B2 | Facility for treating objects in a process tank | Emerging Cross-Sectional Technologies | 3 | Expired |
| US6244282A | Substrate treatment device | Emerging Cross-Sectional Technologies | 3 | Expired |
| US5954068A | Device and method for treating substrates in a fluid container | Electricity | 3 | Expired |
| US6270585A | Device and process for treating substrates in a fluid container | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6145520A | Apparatus for processing substrates in a fluid tank | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6257255A | Substrate treatment device | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6269822A | Installation for wet-treating substrates | Emerging Cross-Sectional Technologies | 1 | Expired |
| US6360921B1 | Bellows-type dispensing pump | Mechanical Engineering; Lighting; Heating | 1 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.