Integrated two-terminal fuse-antifuse and fuse and integrated two-terminal fuse-antifuse structures incorporating an air gap
US5903041A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 21, 1994 |
| Grant date | May 11, 1999 |
| Priority date | — |
| Expiry date | Jun 21, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A two-terminal fuse-antifuse structure comprises a horizontal B-fuse portion and a vertical A-fuse portion disposed between two metallization layers of an integrated circuit device. The two-terminal fuse-antifuse can be programmed with a relatively high current applied across the two terminals to blow the B-fuse, or with a high voltage applied across the two terminals to program the A-fuse. Such a device, connected between two circuit nodes, initially does not provide an electrical connection between the two circuit nodes. It may then be programmed with a relatively high voltage to blow the A-fuse, causing it to conduct between the two circuit nodes. Then, upon application of a relatively high current between the two circuit nodes, the B-fuse will blow, making the device permanently non-conductive. An improvement permitting higher current programming of B-fuses either alone or as part of Ab-fuse structures, incorporates an air gap which provides a pocket of space either above, below or both above and below the B-fuse portion of the device. This air gap provides a place for material disrupted (melted or vaporized) by a fuse or Ab-fuse programming event to go, eliminates direct conta…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.