Electrostatic chuck with ceramic pole protection
US5905626A · kind A · utility
5Cited by
13References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 12, 1998 |
| Grant date | May 18, 1999 |
| Priority date | — |
| Expiry date | Apr 12, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Electrostatic chucks are disclosed in which a conductive pole piece is provided with a flat top surface, sidewall and a perimeter with radiused corners connecting the top surface to the sidewall. The perimeter and sidewall are coated with a ceramic insulative material covering the radiused corners. The top surface is coated with a ceramic semiconductive material. Then the surfaces of the pole piece not covered by ceramic material are anodized in such a manner that the intersections between anodized pole surfaces and ceramic material are below the pole piece top surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.