Patent · US Expired

Transport device for workpieces in a vacuum system

US5909995A · kind A · utility

43Cited by

7References

12Claims

0Family size

Assignee

Balzers Aktiengesellschaft · LI

Inventors

Hans Wolf · Niederrodenbach, DE
Reiner Hinterschuster · Hammersbach, DE
Guenter Kemmerer · Alzenau, DE

Key dates

Filing date	Sep 26, 1997
Grant date	Jun 8, 1999
Priority date	—
Expiry date	Sep 26, 2017

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/139
WIPO fieldHandling
WIPO sectorMechanical engineering

Abstract

A device for transporting substrates through a vacuum system has a flat, parallel piped, plate-shaped substrate holder with upper and lower holder areas that are moveable in a vertical position along a transport path through the system. The upper part of the substrate holder is supported without contact and is movably guided by a magnetic arrangement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.