Electron microscope
US5912462A · kind A · utility
6Cited by
8References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 2, 1996 |
| Grant date | Jun 15, 1999 |
| Priority date | — |
| Expiry date | Aug 2, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In the electron microscope, a degree of sample contamination caused by irradiating electron beams to a sample can be suppressed to an allowable range. The electron microscope is comprised of: means for directly measuring an electron beam irradiation current to a sample; time measuring means for measuring irradiation time of electron beams to an observation region on the sample; and means for calculating a dose of the electron beams irradiated to the observation region based upon the measured electron beam irradiation current, the measured electron beam irradiation time, and preset observation magnification.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.