Inventor · Hitachinaka, JP

Sho Takami

13Patents
4h-index
18Co-inventors
53Inventor score

Filing activity: Aug 2, 1996 → Oct 19, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US6444981B1 Scanning electron microscope Electricity 16 Expired
US6512228B2 Scanning electron microscope Electricity 10 Expired
US7187345B2 Image forming method and charged particle beam apparatus Electricity 7 Expired
US5912462A Electron microscope Electricity 6 Expired
US7817105B2 Image forming method and charged particle beam apparatus Electricity 3 Active
US7030376B2 Electron beam apparatus and method for production of its specimen chamber Electricity 3 Expired
US7091496B2 Electron microscopic inspection apparatus Electricity 2 Expired
US7435958B2 Electron beam apparatus and method for production of its specimen chamber Electricity 2 Expired
US8686380B2 Charged particle beam apparatus Electricity 1 Active
US7795581B2 Pattern measuring method and electron microscope Electricity 1 Active
US7205550B2 Electron beam apparatus and method for production of its specimen chamber Electricity 0 Active
US7566892B2 Electron beam apparatus and method for production of its specimen chamber Electricity 0 Active
US8203504B2 Image forming method and charged particle beam apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.