Device for transporting substrates
US5913653A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Apr 11, 1997 |
| Grant date | Jun 22, 1999 |
| Priority date | — |
| Expiry date | Apr 11, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/121
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Apparatus for transporting substrates to and from at least one device (1) for holding substrates (2), the at least one device having a substrate support (5) disposed in a vacuum chamber (4, 4', 4"). The apparatus includes at least one displaceably disposed gripper (75), which can be displaced by a mechanical and/or electro-magnetically or magnetically operating positioning device (130) between a substrate gripping position and a substrate release position, and a centering device (157, 157', 161) for centering a substrate relative to the substrate support in conjunction with transport of the substrate by the apparatus to the substrate support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.