Sensor devices having a movable structure
US5914521A · kind A · utility
7Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 1997 |
| Grant date | Jun 22, 1999 |
| Priority date | — |
| Expiry date | Jul 30, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0235
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor (11) has a movable plate (16) that moves in response to an external acceleration. The movable plate (16) has a finger (17) that is capacitively coupled to fingers (13,14) that are attached to a substrate (12). A travel stop (19) is used to stop the movable plate (16) before the finger (17) on the movable plate (16) collides into the fingers (13,14) on the substrate (12).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.