Inventor · Mesa, AZ, US

Daniel N. Koury, Jr.

26Patents
12h-index
17Co-inventors
78Inventor score

Filing activity: Sep 24, 1984 → Mar 17, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US6845670B1 Single proof mass, 3 axis MEMS transducer Physics 69 Expired
US7829366B2 Microelectromechanical systems component and method of making same Electricity 36 Active
US4647331A Method for assembling an electro-optical device Electricity 33 Expired
US6936492B2 Single proof mass, 3 axis MEMS transducer Physics 28 Expired
US8477473B1 Transducer structure and method for MEMS devices Emerging Cross-Sectional Technologies 26 Active
US4876212A Process for fabricating complimentary semiconductor devices having pedestal structures Emerging Cross-Sectional Technologies 22 Expired
US6465320B1 Electronic component and method of manufacturing Electricity 19 Expired
US6018998A Acceleration sensing device and method of operation and forming Physics 18 Expired
US7268463B2 Stress release mechanism in MEMS device and method of making same Physics 18 Expired
US8056415B2 Semiconductor device with reduced sensitivity to package stress Physics 17 Active
US5806365A Acceleration sensing device on a support substrate and method of operation Physics 16 Expired
US4757029A Method of making vertical field effect transistor with plurality of gate input cnnections Electricity 15 Expired
US6122963A Electronic component for measuring acceleration Physics 12 Expired
US7637160B2 MEMS suspension and anchoring design Physics 12 Active
US6228275A Method of manufacturing a sensor Physics 9 Expired
US5914521A Sensor devices having a movable structure Performing Operations; Transporting 7 Expired
US7628072B2 MEMS device and method of reducing stiction in a MEMS device Physics 6 Active
US8553389B1 Anchor design and method for MEMS transducer apparatuses Electricity 5 Active
US8710597B1 Method and structure for adding mass with stress isolation to MEMS structures Electricity 2 Active
US9376312B2 Method for fabricating a transducer apparatus Electricity 1 Active
US9300227B2 Monolithic body MEMS devices Emerging Cross-Sectional Technologies 1 Active
US9377487B2 Transducer structure and method for MEMS devices Emerging Cross-Sectional Technologies 1 Active
US8564075B1 Package tolerate design and method Electricity 1 Active
US9602026B2 Temperature compensation for MEMS devices Emerging Cross-Sectional Technologies 0 Active
US9246412B2 Suspended passive element for MEMS devices Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.