Profile measuring apparatus
US5917181A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 1, 1997 |
| Grant date | Jun 29, 1999 |
| Priority date | — |
| Expiry date | Apr 1, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A profile measuring apparatus provided with an improved probe for measuring profiles throughout a wide area of the surface of an object with a high level of response and high accuracy. The probe 10 comprises an arm 3 having a stylus 1 fixedly mounted to the distal end thereof, which is coupled to a stationary part 11 of the apparatus by an arm holding member 5 made of a V-shaped leaf spring in such a way that the arm 3 is tilted in one axial direction by a contact pressure exerted thereto during measurement. Displacement of the arm 3 is thereby detected through measuring an elastic deformation of the leaf spring caused by the contact pressure exerted to the stylus 1 being pressed against the surface to be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.