Microfabricated filter and shell constructed with a permeable membrane
US5919364A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 1996 |
| Grant date | Jul 6, 1999 |
| Priority date | — |
| Expiry date | Jun 24, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2202/03
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Microfabricated filters constructed with permeable polysilicon membranes and methods for fabricating such filters. The filters include a frame structure having a plurality of openings therethrough and a permeable polysilicon membrane disposed over the openings in the frame structure. The frame structure provides support for the permeable polysilicon membrane. The pores of the filter may be smaller than the resolution limit of photolithography. The width of the pores may be as small as about 0.01 .mu.m, while the length of the pores may be as small as about 0.05 .mu.m. The filters feature a relatively high throughput due to the extremely short pore length. The filters may be fabricated utilizing standard microfabrication processes. Also, microfabricated shells constructed with permeable membranes for encapsulating microfabricated devices such as microelectromechanical structures (MEMS) and methods for fabricating such shells. The shells include a frame structure having a plurality of openings therethrough, a permeable membrane disposed on the openings through the frame structure, an optional sealing structure disposed on the permeable membrane, and a cavity bounded by the frame stru…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.