Thermosetting anti-reflective coatings at deep ultraviolet
US5919599A · kind A · utility
79Cited by
8References
19Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 30, 1997 |
| Grant date | Jul 6, 1999 |
| Priority date | — |
| Expiry date | Sep 30, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08F2810/20
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
Anti-reflective coating compositions having improved etch rate, inter alia, are prepared from certain high molecular weight polymers and copolymers, particularly glycidyl methacrylate with grafted dyes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.