Patent · US Expired

Device for treating substrates in a fluid container

US5921257A · kind A · utility

23Cited by

19References

31Claims

0Family size

Assignee

Steag Micro Tech GmbH · DE

Inventors

Martin Weber · Borgo San Lazzaro, DE
John Oshinowo · Villingen-Schwenningen, DE

Key dates

Filing date	Dec 6, 1996
Grant date	Jul 13, 1999
Priority date	—
Expiry date	Dec 6, 2016

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S134/902
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A device for treating substrates includes a fluid container in which the substrates are contained during treatment. A nozzle system is connected to the sidewalls and/or bottom of the fluid container and includes a plurality of nozzles for introducing a fluid into the fluid container.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.