Wafer sample retainer for an electron microscope
US5923040A · kind A · utility
6Cited by
4References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 1, 1997 |
| Grant date | Jul 13, 1999 |
| Priority date | — |
| Expiry date | Dec 1, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A wafer sample retainer for an electron microscope includes a clamp arranged to engage one or more wafer samples against a post. The clamp may be spring biased and may be operable by depressing a portion of a spring biased member to pivot the spring biased member away from a support post to create an opening to receive the samples. The sample holder may be removably mounted on a base which may be positioned using a conventional electron microscope positioner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.