Patent · US Expired

Semiconductor device with metallic protective film

US5923072A · kind A · utility

26Cited by
16References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 28, 1997
Grant dateJul 13, 1999
Priority date
Expiry dateOct 28, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/64
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device has a metal pattern composed of a material reacting on water and a metal protective film formed between an intrusion path of water and the metal pattern on the surface of a part of the metal pattern. The metal pattern is composed of a refractory metal, a refractory metal compound or aluminum, and the metal protective film is formed of any of gold, platinum, palladium, gold alloy, platinum alloy, palladium alloy and lanthanum hexaboron.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.