Discharge electrode, shape-restoration thereof, excimer laser oscillator, and stepper
US5923693A · kind A · utility
34Cited by
9References
9Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Feb 28, 1997 |
| Grant date | Jul 13, 1999 |
| Priority date | — |
| Expiry date | Feb 28, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/0388
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A discharge electrode for an excimer laser oscillator according to the present invention contains oxygen at a content of not more than 10 ppm, and a method of restoring the shape of a discharge electrode according to the present invention comprises introducing an inert gas into a laser chamber, and conducting discharge for several seconds.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.