Tadahiro Ohmi
215Patents
13Active
215Granted
43Portfolio score
Filing activity: Jul 21, 1989 → Jul 17, 2013 · 11 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6446573B2 | Plasma process device | Electricity | 525 | Expired |
| US6792889B2 | Plasma processing apparatus and method capable of performing uniform plasma treatment by control of excitation power | Electricity | 165 | Expired |
| US6585851B1 | Plasma etching device | Electricity | 161 | Expired |
| US8114245B2 | Plasma etching device | Electricity | 156 | Expired |
| US6255731A | SOI bonding structure | Electricity | 111 | Expired |
| US5816285A | Pressure type flow rate control apparatus | Emerging Cross-Sectional Technologies | 91 | Expired |
| US6035893A | Shutoff-opening devices and fluid control apparatus comprising such devices | Emerging Cross-Sectional Technologies | 88 | Expired |
| US5975112A | Fluid control device | Emerging Cross-Sectional Technologies | 72 | Expired |
| US6152168A | Pressure-type flow rate control apparatus | Emerging Cross-Sectional Technologies | 71 | Expired |
| US6257270A | Fluid control device | Emerging Cross-Sectional Technologies | 70 | Expired |
| US5110438A | Reduced pressure surface treatment apparatus | Electricity | 68 | Expired |
| US5714795A | Semiconductor device utilizing silicide reaction | Electricity | 61 | Expired |
| US5487398A | Rotary cleaning method with chemical solutions and rotary cleaning apparatus with chemical solutions | Emerging Cross-Sectional Technologies | 58 | Expired |
| US6357385B1 | Plasma device | Electricity | 51 | Expired |
| US7521324B2 | Semiconductor device and method for manufacturing the same | Electricity | 51 | Expired |
| US6830652B1 | Microwave plasma processing apparatus | Electricity | 46 | Expired |
| US5983933A | Shutoff-opening device | Emerging Cross-Sectional Technologies | 45 | Expired |
| US6302130A | Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers | Emerging Cross-Sectional Technologies | 41 | Expired |
| US6039360A | Couplings for fluid controllers | Mechanical Engineering; Lighting; Heating | 40 | Expired |
| US5415718A | Reactive ion etching device | Electricity | 40 | Expired |
| US6871803B1 | Valve with an integral orifice | Electricity | 37 | Expired |
| US6314992A | Fluid-switchable flow rate control system | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6289923A | Gas supply system equipped with pressure-type flow rate control unit | Emerging Cross-Sectional Technologies | 35 | Expired |
| US5783790A | Wet treatment method | Chemistry; Metallurgy | 34 | Expired |
| US5923693A | Discharge electrode, shape-restoration thereof, excimer laser oscillator, and stepper | Electricity | 34 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.