Metal-insulator-metal capacitor
US5926359A · kind A · utility
50Cited by
8References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 1, 1996 |
| Grant date | Jul 20, 1999 |
| Priority date | — |
| Expiry date | Apr 1, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An interconnection wiring system incorporating two levels of interconnection wiring separated by a first dielectric, a capacitor formed by a second dielectric, a bottom electrode of the lower interconnection wiring or a via and a top electrode of the upper interconnection wiring or a separate metal layer. The invention overcomes the problem of leakage current and of substrate stray capacitance by positioning the capacitor between two levels of interconnection wiring.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.