Integrated circuit tester using ion beam
US5929645A · kind A · utility
6Cited by
8References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 25, 1997 |
| Grant date | Jul 27, 1999 |
| Priority date | — |
| Expiry date | Apr 25, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/31816
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Testing an Integrated circuit (420) for performance during exposure to an ion beam. Ion beams of atoms with atomic weights in the range of 6 to 20 impinging on an integrated circuit simulate the effects of cosmic ray neutrons interacting with silicon atoms of the integrated circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.