Method and Apparatus for terminal emulation in a semiconductor fabricating facility
US5933621A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 25, 1997 |
| Grant date | Aug 3, 1999 |
| Priority date | — |
| Expiry date | Mar 25, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67276
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for emulating a dedicated terminal in semiconductor fabricator having a back end that includes a source of semiconductor substrates, a transport mechanism for transporting the substrates and a process chamber. A wall separates the back end from a front end environment. A central processing unit is provided that includes a driver for recognizing terminal text and display commands and that executes terminal text and display commands on the display screen of a terminal. A connector is provided at the back end and it is interconnected with the driver of the central processing unit. A microcomputer, that can be a laptop, personal computer or other relatively compact and portable computer is provided. This computer has a display screen and a commands entry device, such as a trackball or mouse, for manipulating commands on the display screen. The microcomputer recognizes commands input from the driver of the central processing unit and translates the commands into a printed form on the display screen. The microcomputer also translates commands in printed form on the display screen to a format recognized by the driver and it transmits the commands in this format to t…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.