Pod loader interface improved clean air system
US5934991A · kind A · utility
38Cited by
5References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 1, 1998 |
| Grant date | Aug 10, 1999 |
| Priority date | — |
| Expiry date | Feb 1, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67775
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A fan is attached directly adjacent to a clean air filter sealing an air inlet under a horizontal portion of a plenum chamber below a vertically movable loading platform which all move as a unit. A vertical portion of the plenum chamber, trapezoidal in cross-section, communicates with a wafer pod on the loading platform through an angled perforated grill sealing an air outlet from the vertical portion of the plenum chamber. Clean air flows evenly throughout the entire height of an angled perforated grill over the surfaces of the wafers. Mechanisms lift the pod cover and load and unload the wafer carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.