John M. Rush
12Patents
7h-index
8Co-inventors
55Inventor score
Filing activity: May 20, 1991 → Sep 5, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5193969A | Wafer transfer machine | Emerging Cross-Sectional Technologies | 340 | Expired |
| US5870488A | Method and apparatus for prealigning wafers in a wafer sorting system | Electricity | 62 | Expired |
| US5934991A | Pod loader interface improved clean air system | Electricity | 38 | Expired |
| US6494666B2 | Simplified and enhanced SCARA arm | Electricity | 26 | Expired |
| US5885045A | Integrated wafer pod-load/unload and mass-transfer system | Emerging Cross-Sectional Technologies | 16 | Expired |
| US5984610A | Pod loader interface | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6086323A | Method for supplying wafers to an IC manufacturing process | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6193459A | Integrated wafer pod-load/unload and mass-transfer system | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6655423B2 | Unified pod quick-opening apparatus | Emerging Cross-Sectional Technologies | 3 | Expired |
| US5506744A | Ionized airflow manifold for static reduction | Electricity | 2 | Expired |
| US6698992B2 | Elastically expandable positioning device | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6592317B1 | Pod loader interface end effectors | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.