Micromechanical component
US5939171A · kind A · utility
25Cited by
9References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 24, 1997 |
| Grant date | Aug 17, 1999 |
| Priority date | — |
| Expiry date | Jul 24, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Micromechanical component, wherein there are present, between a movable part (2) and a substrate (1), narrowly bounded spikes or spacers (3) which are composed of dielectric and which prevent the movable part from adhering (sticking) to the opposite surface during production and while the component is being operated during deflection in the direction of the substrate. Said spikes are produced by etching an auxiliary layer between the substrate and the structural layer (2) through etching apertures (4) to such an extent that only the layer components (3) forming such spikes are left behind.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.