Markus Biebl
16Patents
9h-index
12Co-inventors
61Inventor score
Filing activity: Oct 25, 1993 → Mar 30, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5760455A | Micromechanical semiconductor component and manufacturing method therefor | Performing Operations; Transporting | 55 | Expired |
| US5447067A | Acceleration sensor and method for manufacturing same | Physics | 51 | Expired |
| US5700379A | Method for drying micromechanical components | Mechanical Engineering; Lighting; Heating | 47 | Expired |
| US5373181A | Sensor for sensing fingerpaints and method for producing the sensor | Physics | 42 | Expired |
| US5939171A | Micromechanical component | Emerging Cross-Sectional Technologies | 25 | Expired |
| US5753134A | Method for producing a layer with reduced mechanical stresses | Performing Operations; Transporting | 23 | Expired |
| US5431051A | Tunnel effect acceleration sensor | Physics | 15 | Expired |
| US5834332A | Micromechanical semiconductor components and manufacturing method therefor | Performing Operations; Transporting | 14 | Expired |
| US5877421A | Acceleration sensor | Physics | 11 | Expired |
| US5450754A | Pressure sensor | Physics | 7 | Expired |
| US5472916A | Method for manufacturing tunnel-effect sensors | Emerging Cross-Sectional Technologies | 6 | Expired |
| US5700702A | Method for manufacturing an acceleration sensor | Emerging Cross-Sectional Technologies | 6 | Expired |
| US5913115A | Method for producing a CMOS circuit | Electricity | 4 | Expired |
| US5911157A | Tunnel effect sensor | Physics | 3 | Expired |
| US6389086B1 | Digital circuit having a filter unit for suppressing glitches | Electricity | 3 | Expired |
| US6410407B1 | Product including a silicon-containing functional layer and an insulating layer made of silicon dioxide, and method fabricating the product | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.