Pickup chuck with an integral heat pipe
US5944093A · kind A · utility
108Cited by
10References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 30, 1997 |
| Grant date | Aug 31, 1999 |
| Priority date | — |
| Expiry date | Dec 30, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for controlling the temperature of a heat generating device. In one embodiment, a pickup chuck having a heat pipe is provided. The heat pipe includes a first end defining an evaporator portion and a second end defining a condenser portion. A thermally conductive member at the first end of the heat pipe is adapted to engage a surface of the heat generating device. Heat is transferred away from the heat generating device by engaging the thermally conductive member with a surface of the heat generating device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.