Wear-through detector for multilayered parts and methods of using same
US5947053A · kind A · utility
34Cited by
15References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 9, 1998 |
| Grant date | Sep 7, 1999 |
| Priority date | — |
| Expiry date | Jan 9, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31701
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to wear-through detection in multilayered parts. This invention specifically encompasses, in one aspect, wear-through detection in semiconductor vacuum processing systems in which a wear indicator that will release a detectable constituent upon exposure to processing conditions is used inside the semiconductor vacuum processing tool. This invention permits real time detection of wear during operation of semiconductor vacuum processing equipment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.