Chemical mechanical polishing carrier fixture and system
US5951382A · kind A · utility
2Cited by
3References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 1997 |
| Grant date | Sep 14, 1999 |
| Priority date | — |
| Expiry date | Dec 1, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/042
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier fixture that does not include transport channels or openings for directing a slurry to a substrate being polished. The carrier fixture may have an inner support coupled to a ring member that contacts a substrate during polishing. The carrier fixture may also have outer supports coupled to the ring member. The carrier fixture is used to manufacture integrated circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.