Electrostatically-actuated structures for fluid property measurements and related methods
US5955659A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 1998 |
| Grant date | Sep 21, 1999 |
| Priority date | — |
| Expiry date | Jan 13, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N11/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A fluid property sensor includes a substrate having a first electrode thereon, and a flexible member adjacent the substrate and the first electrode wherein the flexible member includes a second electrode. A signal generator generates a predetermined electrical signal across the first and second electrodes so that an electrostatic force is generated between the first and second electrodes and so that said flexible member deflects a predetermined distance. A measuring circuit measures an interval of time between the generation of the predetermined electrical signal and the deflection of the flexible member to the predetermined distance and determines a property of a fluid adjacent the flexible member based on the interval of time. For example, the sensor can be used to determine a viscosity of the fluid. Alternately, the fluid can be a compressible gas, and the sensor can be used to determine a pressure of the gas. Related methods are also discussed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.