Annular waveguide vertical cavity surface emitting laser and method of fabrication
US5963576A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 4, 1997 |
| Grant date | Oct 5, 1999 |
| Priority date | — |
| Expiry date | Aug 4, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/166
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An annular waveguide VCSEL for achieving a stable high power single high order mode output including a first mirror stack with mirror pairs in a Al.sub.x Ga.sub.1-x As/Al.sub.y Ga.sub.1-y As material system lattice matched to an active region. The active region includes an active structure sandwiched between a first cladding region adjacent the first mirror stack and a second cladding region, the active structure having at least one quantum well. The VCSEL further includes a second mirror stack lattice matched to the second cladding region and having mirror pairs in a Al.sub.x Ga.sub.1-x As/Al.sub.y Ga.sub.1-y As material system. The second mirror stack including an etched region, thereby defining an annular emission region through which light generated by the annular waveguide VCSEL is emitted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.