Scanning probe microscope and processing apparatus
US5965881A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 1997 |
| Grant date | Oct 12, 1999 |
| Priority date | — |
| Expiry date | Nov 13, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/852
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This scanning probe microscope can accurately obtain information on surfaces of a sample when measuring the sample in a broad range from a slow scanning speed to a fast scanning speed. The scanning probe microscope comprises a cantilever (16) with a probe (15) at its tip, an optical lever mechanism (17,18) for measuring displacement of the cantilever (16), a mechanism for approaching/separating the cantilever against the sample, XY scanning circuit (21), and further comprises a Z axis piezoelectric element (14b) of a tripod for changing the distance between the cantilever and the sample, a control circuit (20) for controlling the distance between the cantilever and the sample to cause a displacement signal s1 obtained from the optical lever mechanism to be identical to a set value s0, and an adder (24) for adding a control signal from the control circuit and a signal based on the deviation between the displacement signal and the set value. The information on the sample surface is obtained from a signal outputted from the adder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.