Radiation sensitive compositions and methods
US5968712A · kind A · utility
27Cited by
12References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 12, 1993 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | Nov 12, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0392
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides radiation sensitive compositions and methods that comprise novel means for providing relief images of enhanced resolution. In one aspect the invention provides a method for controlling diffusion of photogenerated acid comprising adding a polar compound to a radiation sensitive composition and applying a layer of the composition to a substrate; exposing the composition layer to activating radiation whereby a latent image is generated comprising a distribution of acid moieties complexed with the polar compound; and treating the exposed composition layer to provide an activating amount of acid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.