Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device
US5969441A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 10, 1997 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | Oct 10, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20213
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device. A positioning device (3, 97, 179) with a first displacement unit (25, 189) for displacing a first object holder (11, 181) and a second displacement unit (27, 191) for displacing a second object holder (13, 183). The object holders can be displaced by the positioning device alternately from a measuring position into an operational position and can be displaced by the respective displacement units independently of one another in the measuring position and in the operational position. The displacement units are provided with force actuators which each have a first part (47, 49; 117, 119; 215, 217) which is coupled to the relevant object holder and which is displaceable under the influence of a driving force relative to a second part (59, 61; 133, 135, 137, 139; 219, 221) which is fastened to a balancing unit (69, 149, 205) which is common to the two displacement units. The balancing unit is displaceably guided relative to a base (81, 209), so that reaction forces of the displacement units are converted into displacements of the balancing unit relative…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.