Patent · US Expired

Semiconductor testing apparatus

US5969534A · kind A · utility

8Cited by

8References

8Claims

0Family size

Assignee

Siemens Aktiengesellschaft · DE

Inventors

Holger Hubner · Baldham, DE
Werner Weber · Munich, DE
Siegmar Koppe · Laatzen, DE
Helmut Klose · Munich, DE

Key dates

Filing date	Jul 11, 1996
Grant date	Oct 19, 1999
Priority date	—
Expiry date	Jul 11, 2016

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06783
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and apparatus for the reversible contacting of a semiconductor circuit level to assist in performing a function test. The apparatus includes a testing head having test points arranged at a test side lying opposite the contact surfaces of a semiconductor circuit level. The test points are formed of liquid contacts in recesses in the test side of the testing head wherein the liquid contacts form menisci that project beyond the surface of the testing head. The recesses, in turn, are provided for metallizations which are connected to electrically-conductive leads. In addition, the surface may be provided with a roughening or with etched trenches.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.