Beam folding optics system and method of use with application in ellipsometry and polarimetry
US5969818A · kind A · utility
14Cited by
12References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1998 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | Aug 31, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/447
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an electromagnetic beam directing system and method which enables changing the direction of propagation of a beam of electromagnetic radiation without significantly changing the phase angle between orthogonal components therein. Two pairs of mirrors are oriented to form two orthogonally related planes such that phase shift entered to an electromagnetic beam by interaction with the first pair of mirrors is canceled by interaction with the second pair.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.