Integrated circuit failure analysis using color voltage contrast
US5970167A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 7, 1996 |
| Grant date | Oct 19, 1999 |
| Priority date | — |
| Expiry date | Nov 7, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for analyzing failures in integrated circuits. A first image is obtained using an emission or electron microscope while an integrated circuit is operating under a first set of conditions. The image is integrated for improved resolution with a camera in front of the microscope screen or with a digitizer coupled to receive video signals from the microscope. The first image is digitized and stored in a first channel of an RGB digitizer board and displayed on a display screen. A second image is obtained in the same way and is digitized and stored in a second channel of the RGB digitizer board and displayed on the display screen. The remaining channel of the RGB digitizer board is coupled to receive live images. The resulting combined image appears as a black and white image so long as the images are aligned. Any differences between the three images will appear conspicuously in color. The input logic levels to the integrated circuit are changed. Nodes having changed logic levels will appear in color in the display because they will only affect the third channel. In addition, the displayed image will simultaneously show nodes which have not changed states in differ…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.