Microfabricated cantilever ratchet valve, and method for using same
US5970998A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 27, 1998 |
| Grant date | Oct 26, 1999 |
| Priority date | — |
| Expiry date | Feb 27, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0318
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microfabricated valve includes a substrate with a fluid path. A main cantilever is positionable in a resting closed state to prevent fluid movement through the fluid path and a resting open state that allows fluid movement through the fluid path. A ratchet cantilever supports the main cantilever in either the resting closed state or the resting open state, such that the main cantilever does not have to be energized to maintain the resting closed state or the resting open state. A valve state transition mechanism selectively energizes the main cantilever or the ratchet cantilever during a valve state transition period to selectively transition between the resting open and closed states.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.