Grinding machine
US5971836A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 29, 1995 |
| Grant date | Oct 26, 1999 |
| Priority date | — |
| Expiry date | Aug 29, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/304
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A grinding machine comprises a grinding member having a thickness greater than 10 mm and an outer contact surface extending in a thickness direction of the grinding member for contacting a surface of a workpiece. The grinding member is supported by a first rotational shaft for rotation about a first rotational axis. A first moving mechanism reciprocates the first rotational shaft along a first displacement axis. The workpiece is supported by a second rotational shaft for rotation about a second rotational axis perpendicular to the first displacement axis and the first rotational axis. A second moving mechanism moves at least one of the workpiece and the grinding member along a second displacement axis to bring the outer contact surface of the grinding member into linear contact with the surface of the workpiece to grind the workpiece. The linear contact between the outer contact surface of the grinding member and the surface of the workpiece has a contact length greater than 10 mm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.